منابع مشابه
A mechanical micro molecular mass sensor
One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...
متن کاملA mechanical micro molecular mass sensor
One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...
متن کاملa mechanical micro molecular mass sensor
one of the bio-sensing mechanisms is mechanical. rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. this study explains determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on silicon wafer, with the ...
متن کاملMicro Coriolis Flow Sensor
In recent years, the interest in integrated microfluidic systems has been steadily growing. In these systems (for instance (bio)chemical and DNA analysis and synthesis devices), accurate dosing of liquids and/or gases is of great importance. To achieve this, accurate (mass) flow sensing is necessary. This project is dedicated to the development of a new micro Coriolis flow sensor. The inherent ...
متن کاملCouple Stress Effect on Micro/Nanocantilever-based Capacitive Gas Sensor
Micro/nanocantilevers have been employed as sensors in many applications including chemical and biosensing. Due to their high sensitivity and potential for scalability, miniature sensing systems are in wide use and will likely become more prevalent in micro/nano-electromechanical systems (M-NEMSs). This paper is mainly focused on the use of sensing systems that employ micro/nano-size cantilever...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Electronics, Information and Systems
سال: 1996
ISSN: 0385-4221,1348-8155
DOI: 10.1541/ieejeiss1987.116.8_887